Silicon nitride ( si3n4 ) has been widely applied in such fields as micro - electronics and optoelectronics as a promising ceramic material because of its excellent properties 氮化硅( si3n4 )具有許多特殊的優(yōu)越性能,是一種應(yīng)用前景廣闊的陶瓷材料,已廣泛應(yīng)用于微電子、光電子領(lǐng)域。